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PROBES WITH FIDUCIAL TARGETS, PROBE SYSTEMS INCLUDING THE SAME, AND ASSOCIATED METHODS
PROBES WITH FIDUCIAL TARGETS, PROBE SYSTEMS INCLUDING THE SAME, AND ASSOCIATED METHODS
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机译:带有目标的问题,包含相同问题的探针系统以及相关方法
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摘要
Probes with fiducial targets, probe systems including the same, and associated methods. The probes include a probe body, a probe beam, a probe tip configured to contact a device under test (DUT), and a fiducial target affixed to the probe beam. The fiducial target is configured to be visible to an optical system to determine a position of the probe tip relative to the DUT. The methods include methods of utilizing and/or manufacturing the probes.
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