This method for manufacturing a chromel-alumel thermocouple is characterized in that: a thermocouple substrate is held in a substrate chamber that has had a vacuum created therein, chromel and alumel film materials are introduced into a material chamber, the inside of the material chamber is made to have an inert gas atmosphere, nanoparticles of a particle size not greater than 200 nm are formed by means of the heat-induced evaporation of the film materials inside the material chamber through irradiation with laser light and the condensation in the inert gas atmosphere of the film materials subjected to heat-induced evaporation, the nanoparticles and inert gas are introduced into the substrate chamber as a gas flow via a supersonic nozzle, and the nanoparticles are deposited in a preset shape, as a thermocouple, through the spraying of the gas flow onto the substrate while the arrangement of the supersonic nozzle and substrate is adjusted. As a result, it is possible to deposit an alumel film and chromel film having fine particle sizes and preferred compositions on a substrate and manufacture a chromel-alumel thermocouple quickly and with high material efficiency.
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