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GAS INJECTOR INSERT SEGMENT FOR SPATIAL ALD
GAS INJECTOR INSERT SEGMENT FOR SPATIAL ALD
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机译:空间ALD的气体注入器插入段
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摘要
Gas injector inserts having a wedge-shaped housing, at least one first slot and at least one second slot are described. The housing has a first opening in the back face that is in fluid communication with the first slot in the front face and a second opening in the back face that is in fluid communication with the second slot in the front face. Each of the first slot and the second slot has an elongate axis that extends from the inner peripheral end to the outer peripheral end of the housing.
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