CILIUM TEMPERATURE SENSING-BASED FLEXIBLE ELECTRONIC SKIN AND PREPARATION METHOD THEREFOR

摘要

A flexible electronic skin based on cilium temperature sensing, comprising a temperature sensing unit (10), a heat transfer unit (20) placed on the temperature sensing unit (10), and an encapsulation layer (30) that integrally encapsulates the temperature sensing unit (10) and the heat transfer unit (20), wherein the temperature sensing unit (10) comprises a flexible substrate (11), and an insulation layer (12), transition layer (13), plurality of thin film thermopiles (14) and thermal insulation layer (15) deposited on the flexible substrate (11) successively from bottom to top; the heat transfer unit (20) comprises a plurality of heat transfer cilia (21) that are separately fixed onto heat transfer regions (141) of the respective thin film thermopiles (14) and that extend outside the thermal insulation layer (15) and the encapsulation layer (30). A preparation method for the flexible electronic skin based on cilium temperature sensing.