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SPECTROSCOPIC CHARACTERISTIC MEASUREMENT DEVICE, SPECTROSCOPIC CHARACTERISTIC MEASUREMENT METHOD, AND FURNACE CONTROL METHOD
SPECTROSCOPIC CHARACTERISTIC MEASUREMENT DEVICE, SPECTROSCOPIC CHARACTERISTIC MEASUREMENT METHOD, AND FURNACE CONTROL METHOD
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机译:光谱特征测量装置,光谱特征测量方法和炉控制方法
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摘要
A spectroscopic characteristic measurement device 1 according to an embodiment of the present invention comprises: an imaging spectroscopic device 4 that acquires light emitted from a linear region of an object A or reflected light from the linear region as spectral information; a two-dimensional imaging device 6 that captures an image of a two-dimensional region containing the linear area on the object A; and an arithmetic device 7 that determines, on the basis of the image captured by the two-dimensional imaging device 6, the range in which the imaging spectroscopic device 4 acquires the spectral information.
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