METHOD FOR PRODUCING A MULTILEVEL IMPRINT MASTER, MULTILEVEL IMPRINT MASTER, AND USE OF A MULTILEVEL IMPRINT MASTER

摘要

A method for producing a multilevel imprint master is described. The method includes providing a substrate (10) having a main surface (10A) providing a first level (11) and creating a first set (21) of features in the substrate (10). The first set (21) of features provides a second level (12) being below the first level (11). Further, the method includes creating a second set (22) of features on the substrate (10). The second set (22) of features provides a third level (13) being above the first level (11).