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-- METAL-OXY-FLUORIDE FILMS FOR CHAMBER COMPONENTS
-- METAL-OXY-FLUORIDE FILMS FOR CHAMBER COMPONENTS
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机译:-用于腔室组件的金属-氧-氟化物膜
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摘要
An article includes a body having a coating. The coating includes Y-O-F coatings or other yttrium-based oxy-fluoride coatings produced by performing a fluorination process on an yttrium-based oxide coating or by performing an oxidation process on an yttrium-based fluorine coating.
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