LOW-PRESSURE PLASMA REACTOR FOR THE INCREASE IN ABATEMENT EFFICIENCY OF POLLUTIONS

摘要

Disclosed is a low-pressure plasma reactor for improving a contaminant removal rate. The low pressure plasma reactor includes an insulator, a first ground electrode, a high voltage electrode, a second ground electrode, and a magnetic field generator. The insulator has a tubular shape through which the process gas passes, and the first ground electrode has a tubular shape connecting the insulator and the vacuum pump. The high voltage electrode is located on the outer surface of the insulator at a distance from the first ground electrode, and is connected to an AC power source to receive the driving voltage. The second ground electrode is located inside the first ground electrode, and a magnetic field generating unit is installed outside the first ground electrode to apply a magnetic field around the second ground electrode.