首页>
外国专利>
LOW-PRESSURE PLASMA REACTOR FOR THE INCREASE IN ABATEMENT EFFICIENCY OF POLLUTIONS
LOW-PRESSURE PLASMA REACTOR FOR THE INCREASE IN ABATEMENT EFFICIENCY OF POLLUTIONS
展开▼
机译:低压等离子体反应器可提高污染的排放效率
展开▼
页面导航
摘要
著录项
相似文献
摘要
A low pressure plasma reactor for improving contaminant removal rate is disclosed. The low pressure plasma reactor includes an insulator, a first ground electrode, a high voltage electrode, a second ground electrode, and a magnetic field generator. The insulator has a tubular shape through which the process gas passes, and the first ground electrode has a tubular shape connecting the insulator and the vacuum pump. The high voltage electrode is located on the outer surface of the insulator at a distance from the first ground electrode, and is connected to the AC power source to receive the driving voltage. The second ground electrode is located inside the first ground electrode, and the magnetic field generating unit is installed outside the first ground electrode to apply a magnetic field around the second ground electrode.
展开▼