APPARATUS TO DETECT FOREIGN MATTER IN CONTINUOUS PRODUCTION PROCESS HAVING MULTIPLE INSPECTION AREAS APPLIED ON MOVING PATH OF OBJECT TO BE INSPECTED

摘要

The present invention relates to an apparatus to detect a foreign matter from an object to be inspected while transferring the continuously produced object to be inspected. According to the present invention, the apparatus comprises: a transfer unit to put the object to be inspected thereon and to transfer the object to be inspected to a target position; a first inspection unit disposed on a first inspection area arranged in a crossing direction on a moving path of the object to be inspected transferred through a transfer unit to measure a macroscopic position of a foreign matter included in the object to be inspected; a second inspection unit having a second inspection area for a part in the lateral direction of the object to be inspected on a downstream of the first inspection area along the transfer path of the object to be inspected and precisely measuring the position of the foreign matter; and a control unit adjusting the position of the second inspection unit corresponding to the position of the foreign matter measured from the first inspection area to pass the foreign matter through the second inspection area.;COPYRIGHT KIPO 2019