MULTIFUNCTIONAL POTENTIOMETRIC GAS SENSOR ARRAY WITH AN INTEGRATED TEMPERATURE CONTROL AND TEMPERATURE SENSORS

摘要

Embodiments of the invention relate to a gas sensor and a method for sensing one or more gases. One embodiment includes a sensor electrode array maintained at a similar or different temperature and the sensitivity and species selectivity of the device can be well coordinated between the other pair of sensor electrodes. Certain embodiments include a gas sensor arrangement to monitor combustion exhaust gases and / or chemical reaction byproducts. One embodiment of the present apparatus relates to the present invention which operates at high temperatures and can withstand harsh chemical environments. Embodiments of the apparatus are made on a single substrate. The device may include a sensor electrode in an environment such that the production costs are continuously reduced by allowing the electrodes to be coplanar. Embodiments of the apparatus can provide improvements in sensitivity, selectivity, and single intervention through surface temperature control.