Gantry beam reinforced by carbon composite material and reinforced beam for process equipment

摘要

According to the present invention, a beam and a plurality of reinforcement plates made of thermal expansion coefficient of different materials are attached to be spaced from each other by a predetermined interval in the longitudinal direction of the beam. Accordingly, when heat deflection occurs in accordance with an increase or a decrease in temperature, if any one portion of a portion to which the reinforcement plates are attached and a portion to which the reinforcement plates are not attached is expanded, the other portion is contracted. Therefore, a convex part and a recessed part by the heat deflection are alternatively formed so that an average deflection rate can be minimized in case of heat deflection.