Process and system for measuring morphological characteristics of a fiber laser annealed polycrystalline silicon film on a flat panel display

摘要

A method of measuring a morphological characteristic of a laser annealed film having a crystalline structure formed by at least one row of parallel positioned particles each having a uniform length (Lg) and a width (Wg) ) Corresponds to the cumulative width (Wg) of the particles and produces a diffraction of various orders of diffraction, the method comprising the steps of: producing monochromatic light; Directing monochromatic light to the surface of the laser annealed film at an angle varying in the range between 0 ^o (incident angle) and the graying angle; And measuring the morphological characteristics of the laser annealed film along one column length (Lr) by measuring the variation of the characteristics of the monochromatic light diffracted from the surface.