SHOWERHEAD ASSEMBLY FOR DISTRIBUTING A GAS WITHIN A REACTION CHAMBER AND A METHOD FOR CONTROLLING THE TEMPERATURE UNIFORMITY OF A SHOWERHEAD ASSEMBLY

摘要

Disclosed is a shower head assembly to distribute gas in a reaction chamber, capable of controlling temperature uniformity crossing a surface of a gas distribution assembly. According to the present invention, the shower head assembly comprises a chamber formed therein and a gas distribution assembly adjacent to the chamber. The gas distribution assembly comprises a first gas distribution plate including upper and lower surfaces, and a second gas distribution plate including upper and lower surfaces. The second gas distribution plate is disposed on the upper part of the first gas distribution plate. Moreover, the gas distribution assembly comprises one or more heating structures disposed between the first and second gas distribution plates, and a plurality of openings extended from the upper surface of the second distribution plate to the lower surface of the first distribution plate. Moreover, disclosed is a method to control temperature uniformity in a shower head assembly for distributing gas in a reaction chamber.