Mass analysis leak detector with turbo molecular pump and booster pump on common shaft

摘要

The present invention relates to a mass spectrometer leak detector comprising a multistage turbo molecular pump (12), a mass analyzer (17) connected to the suction side of the turbo molecular pump (12), a preliminary vacuum connected to the pressure side of the turbo molecular pump The pump 18 and the test object connector 28 to be tested are provided on the suction side and the pressure side is connected to the pressure side of the turbo molecular pump 12 and the suction side of the preliminary vacuum pump 18 via the gas conduction path 22 Wherein the stages 30 and 32 of the turbo molecular pump 12 and the stage 24 of the booster pump are arranged on a common shaft and have a common drive unit 34, The gas line path is characterized in that it is interrupted by separation 36 between the pressurized side of the booster pump stage 24 which is connectable to the test object and the pump stage suction of the turbo molecular pump 12 connected to the mass analyzer.