首页> 外国专利> Mass analysis leak detector with turbo molecular pump and booster pump on common shaft

Mass analysis leak detector with turbo molecular pump and booster pump on common shaft

机译:质量分析检漏仪,在公共轴上带有涡轮分子泵和增压泵

摘要

The present invention relates to a mass spectrometer leak detector comprising a multistage turbo molecular pump (12), a mass analyzer (17) connected to the suction side of the turbo molecular pump (12), a preliminary vacuum connected to the pressure side of the turbo molecular pump The pump 18 and the test object connector 28 to be tested are provided on the suction side and the pressure side is connected to the pressure side of the turbo molecular pump 12 and the suction side of the preliminary vacuum pump 18 via the gas conduction path 22 Wherein the stages 30 and 32 of the turbo molecular pump 12 and the stage 24 of the booster pump are arranged on a common shaft and have a common drive unit 34, The gas line path is characterized in that it is interrupted by separation 36 between the pressurized side of the booster pump stage 24 which is connectable to the test object and the pump stage suction of the turbo molecular pump 12 connected to the mass analyzer.
机译:质谱仪检漏仪技术领域本发明涉及一种质谱仪检漏仪,其包括:多级涡轮分子泵(12),连接至涡轮分子泵(12)的吸入侧的质量分析仪(17),连接至压力容器的压力侧的初步真空。涡轮分子泵泵18和要测试的测试对象连接器28设置在吸入侧,压力侧通过气体连接到涡轮分子泵12的压力侧和预真空泵18的吸入侧。传导路径22,其中,涡轮分子泵12的级30和32以及增压泵的级24布置在同一轴上并且具有共同的驱动单元34。气体管路的特征在于,其通过分离而中断在可连接到测试对象的增压泵级24的加压侧与连接到质量分析仪的涡轮分子泵12的泵级吸入之间的压力在图36中示出。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号