RANDOM COPOLYMER FOR FORMING NEUTRAL LAYER AND LAMINATE FOR FORMING PATTERN COMPRISING THE SAME METHOD FOR PATTERNING USING THE SAME

摘要

The present invention relates to a random copolymer for forming a neutral layer, which is capable of remarkably reducing process time and process costs, a laminate for forming a pattern including the random copolymer, and a method for forming a pattern using the same. The random copolymer for forming a neutral layer comprises a structural unit represented by chemical formulas 1 to 3. In chemical formulas 1 to 3, R_1 to R_8 are each independently hydrogen, halogen, or a C_1 to C_10 hydrocarbyl group, and L_1 and L_2, a linking group, are each independently a direction bond, -C(=O)-O-, a C_1 to C_20 hydrocarbylene group, or a C_1 to C_20 halocarbenylene group.