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Glass substrate distortion measuring method and glass substrate distortion measuring apparatus

机译:玻璃基板变形测定方法及玻璃基板变形测定装置

摘要

A glass substrate distortion measuring method and an apparatus for measuring a glass substrate distortion capable of easily placing (placing and placing) a glass substrate and capable of measuring the degree of distortion of the glass substrate easily and quickly. A distortion measuring method for measuring a distortion of an arbitrary position of a glass substrate (G) on a mount (20), characterized in that the glass substrate (G) The mounting table 30 is tilted so that the mounting table 30 is turned to a horizontal state and the table 30 in the horizontal state is placed on the measurement area M on the table 20, And the glass substrate G is irradiated with laser light through the opening 31b of the mounting table 30 in the measurement area M to measure the distortion.
机译:玻璃基板变形测量方法和测量玻璃基板变形的设备能够容易地放置(放置和放置)玻璃基板并且能够容易且快速地测量玻璃基板的变形程度。一种用于测量底座(20)上的玻璃基板(G)的任意位置的变形的变形测量​​方法,其特征在于,所述玻璃基板(G)使所述安装台30倾斜以使所述安装台30转向将水平状态的工作台30放置在工作台20上的测量区域M上,并通过测量区域M中的安装工作台30的开口31b向玻璃基板G照射激光以测量玻璃基板G的水平。失真。

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