CONTROLLING BEAM DIVERGENCE IN VERTICAL-CAVITY SURFACE-EMITTING LASER

摘要

In some implementations, a vertical cavity surface emitting laser (VCSEL) includes a substrate layer and an epitaxial layer on the substrate layer. The epitaxial layer may include an active layer, a first mirror, a second mirror, and one or more oxidation layers. The active layer may be between the first mirror and the second mirror, and the one or more oxidation layers may be proximate to the active layer. The one or more oxidation layers may be configured to control beam divergence of a laser beam emitted by the VCSEL based on one or more of a quantity of the one or more oxidation layers, a shape of the one or more oxidation layers, a thickness of the one or more oxidation layers, or a proximity of the one or more oxidation layers to the active layer.;COPYRIGHT KIPO 2019