Single-mode holey vertical-cavity surface-emitting laser with ultra-narrow beam divergence

摘要

We demonstrated oxide-confined 850-nm verticalcavity surface-emitting lasers (VCSELs) with a two-dimensional petal-shaped holey structure composed of several annular-sector-shaped holes. Four types of devices with different hole numbers were designed and fabricated. The measured results showed that the larger hole number was beneficial to purifying the lasing mode, and realizing the single-mode operation. The side mode suppression ratio (SMSR) exceeded 30 dB throughout the entire drive current. Mode selective loss mechanism was used to explain the single-mode characteristic. The single-mode devices possessed good beam profiles, and the lowest divergence angle was as narrow as 3.2° (full width at half maximum), attributed to the graded index profile and the shallow etching in the top distributed Bragg reflector (DBR).