MANUFACTURING METHOD OF METAL CLUSTER ION WITH DISCONTINUOUS SIZE DISTRIBUTION AND METAL CLUSTER ION FOR THE SAME

摘要

The present invention relates to a technique using a cluster ion beam. According to an aspect of the present invention, a manufacturing method of a cluster ion with a discontinuous size distribution comprises the steps of: preparing a target including a metal particle or a metal thin film; and forming a metal cluster ion with a discontinuous size distribution by irradiating the metal particle or the metal thin film of the target with a bismuth ion (Bi_3+) beam.