TDLAS Diffraction Alignment System for TDLAS of Simultaneous Measurement of Multicomponent Gas

摘要

The present invention relates to a device and an alignment method using the same, capable of rapidly aligning within an operating time so as to utilize a TDLAS when there is a lot of gas inside such as in a discharge end and when a distance is far. Provided is an alignment method wherein an alignment direction can be known and can be converged in a short time by using an airy disc generated by a circular hole for alignment.