POLARIZATION MEASURING PROCESS POLARIZATION MEASURING APPARATUS POLARIZATION MEASURING SYSTEM AND PHOTO-ALIGNMENT IRRADIATION APPARATUS

摘要

An object of the present invention is to measure a polarization property of polarization light at high definition. A method for measuring polarization comprises the steps of: obtaining a change curve (Q), which shows a periodic change of light quantity I when a detection polarizer (33) is rotated based on the light quantity I at each rotation angle (θ) obtained by detecting a light which sequentially penetrates a wire grid polarizer (16) and a detection-side polarizer (33) while rotating the detection polarizer (33); and obtaining the change curve (Q) based on the light quantity I at the rotation angle (θ) which includes the rotation angle θ = θa, one minimum point of the change curve (Q), and is included in a range (W) of the rotation angle (θ) where the light quantity I is equal to or less than a predetermined value, in specifying a polarization property of polarization light (F) penetrating the wire grid polarizer (16) based on the change curve (Q).