POLARIZATION MEASURING PROCESS POLARIZATION MEASURING APPARATUS POLARIZATION MEASURING SYSTEM AND PHOTO-ALIGNMENT IRRADIATION APPARATUS

摘要

The subject of this invention is measuring the polarization characteristic of polarized light with high precision. The detection side based on the amount of light I at each rotation angle θ obtained by detecting the light transmitted through the wire grid polarizer 16 and the detection side polarizer 33 while rotating the detection side polarizer 33. The change curve Q which shows the periodical change of the said light quantity I when the polarizer 33 rotates is calculated | required, and the polarized light F which permeate | transmitted the said wire grid polarizer 16 based on this change curve Q. When specifying the polarization characteristic of the range, the range W of the rotation angle θ including the rotation angle θ = θa which is one minimum point of the change curve Q, and the light amount I is equal to or less than a predetermined value The change curve Q is obtained based on the light amount I at the rotation angle θ included in the.