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POLARIZED LIGHT IRRADIATION DEVICE INCLUDING WIRE GRID POLARIZER AND POLARIZED LIGHT IRRADIATION METHOD USING SAME
POLARIZED LIGHT IRRADIATION DEVICE INCLUDING WIRE GRID POLARIZER AND POLARIZED LIGHT IRRADIATION METHOD USING SAME
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机译:包括线栅偏振器的偏振光辐照装置和使用相同方法的偏振光辐照方法
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摘要
According to the present invention, provided is a polarized light irradiation device comprising: at least one light source emitting non-polarized ultraviolet light; at least one polarizer disposed on the lower side of the at least one light source to modulate and emit the non-polarized ultraviolet light into polarized ultraviolet light, and including a plurality of patterns spaced apart from each other and separately having a zigzag bar shape; and a stage disposed at the lower side of the at least one polarizer to mount a substrate having an alignment film on which the polarized ultraviolet light is irradiated is formed. Therefore, an objective of the present invention is to improve deflecting power and uniformity of orientation to prevent defects such as stains and improve a control ratio and yield.;COPYRIGHT KIPO 2019
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