METHOD OF RECYCLING WASTED GRAPHITE MATERIALS WASTED GRAPHITE MATERIALS AND ARTICLES HAVING THE SAME

摘要

The present invention relates to a method for recycling waste graphite materials in a process for producing parts for semiconductor production, waste graphite materials, and products comprising the same. More specifically, the present invention relates to: the method for recycling waste graphite materials in the process for producing parts for semiconductor production, comprising steps of recovering waste graphite materials and processing recovered waste graphite materials, wherein, after the processing step, waste graphite materials have 1 to 200 ppm of a metal impurity concentration; waste graphite materials; and products comprising the same. The present invention can reduce a cost of treating waste graphite and reduce a generation rate of environmental pollutants.