METHOD OF RECYCLING WASTED GRAPHITE MATERIALS WASTED GRAPHITE MATERIALS AND ARTICLES HAVING THE SAME

摘要

The present invention relates to a method for recycling waste graphite material in a part manufacturing process for semiconductor manufacturing, waste graphite material and a product comprising the same, and more particularly, recovering waste graphite material; And processing the recovered waste graphite material; And, after the step of processing, the waste graphite material, the concentration of the metal impurity is 1 ppm to 200 ppm, recycling method of the waste graphite material of the component manufacturing process for semiconductor manufacturing, waste graphite material and products comprising the same It is about.