A system, method and non-volatile computer readable medium for tuning the sensitivity of a modulated wafer and determining a process window for the modulated wafer

摘要

There is provided a system, method and non-volatile computer readable medium for tuning the sensitivity of a modulated wafer and determining a process window for the modulated wafer. The sensitivity of the modulated wafer to the die is dynamically tuned based on a single parameter set. Further, the process window is determined for the wafer that has been modulated from the previously determined parameter specific nominal process window.