SILICONE-COATED DIELECTRIC-FILM FOR DIELECTRIC BARRIER DISCHARGE

摘要

The present invention relates to a dielectric-film for dielectric barrier discharge which is resistant to plasma corrosion. The present invention provides a flexibly thin-typed dielectric-film which is resistant to plasma corrosion and other chemical materials by spreading silicone materials onto a film of polymer materials. According to the present invention, the silicone-coated dielectric-film for dielectric barrier discharge comprises: a first electrode; a second electrode spaced apart from the first electrode; and a dielectric body arranged between the first electrode and the second electrode, wherein the dielectric body is applied to a plasma generator generating dielectric barrier discharge, and is coated by silicone.;COPYRIGHT KIPO 2019