CLOSED DEVICE, VACUUM SYSTEM WITH CLOSED DEVICE, AND METHOD OF OPERATING CLOSED DEVICE

摘要

In particular, a closing device (100, 200) for closing the opening of the vacuum chamber is provided. The closing device comprises: a flange (110) provided in the vacuum chamber and including an opening (112); A blocking device (120, 220) configured to close the opening (112); A first magnetic device (130) configured to create a magnetic closure force between the flange (110) and the blocking device (120) for transferring at least a portion of the blocking device from the open position (I) to the closing position (II); And a magnetic levitation system (150) configured to carry the blocking device (120) in a non-contact manner along a guide structure in a first direction (T) parallel to the flange (110) And a second magnetic device (160) configured to stabilize the isolation device (120) in a second direction (X) across the one direction (T).