Closed device, vacuum system with closed device, and method of operating closed device

摘要

In particular, closing devices 100, 200 for closing the opening of the vacuum chamber are provided. The closing device comprises: a flange 110 provided in the vacuum chamber and comprising an opening 112; Blocking devices 120, 220 configured to close the opening 112; A first magnetic device 130 configured to generate a magnetic closing force between the flange 110 and the blocking device 120 for transferring at least a portion of the blocking device from the open position I to the closed position II; And a magnetic levitation system 150 configured to contactlessly transport the blocking device 120 along a guide structure in a first direction T parallel to the flange 110, wherein the magnetic levitation system comprises: And a second magnetic device 160 configured to stabilize the blocking device 120 in the second direction X across the one direction T.