RGB LED Active-Matrix RGB vertical microLED display using transfer member and selective-transferring method

摘要

The present invention relates to a method of manufacturing an RGB vertical microLED (VLED) display having an active matrix structure by simultaneously transferring and interconnecting an RGB microLED array arranged on an active matrix by the medium of a conductive transfer member. In the manufacturing method of the present invention, it is possible to significantly lower process costs and to implement a high-performance device by using a mechanical peeling method using an inexpensive metal stress layer to peel an LED layer. In addition, in the method for manufacturing a microLED display according to the present invention, it is possible to minimize the waste of an expensive LED growth-only substrate by using a conductive transfer member and a selective transfer in attaching the microLED array to the upper part of an active matrix for display. The microLED (VLED) display further includes a conductive transfer member layer, a middle protection layer, and an upper electrode line.