4f Laser processing system comprising 4f Angle control optics system

摘要

According to the present invention, a laser processing system comprises: a light source irradiating a laser beam; an optical modulator controlling a travelling angle of the laser beam in a swing angle; a 4f angle control optical system changing the swing angle of the optical modulator, and including an optical element having four focal distances; a flying head machining an object to be machined by using the laser beam transferred from the 4f angle control optical system; and a control unit controlling a flying distance of the flying head to prevent a phase reversal of the flying head.