X- X- X-RAY DETECTION OPTICS FOR SMALL-ANGLE X-RAY SCATTEROMETRY

摘要

An X-ray device comprises a mount, an X-ray emission source, a detector, an actuator, and a controller. The mount is configured to retain a sample. The X-ray emission source is configured to direct an X-ray beam towards a first side of the sample. The detector is positioned on a second side of the sample opposite to the first side to accommodate at least a portion of an X-ray transmitted through the sample and output a signal indicating an intensity of the accommodated X-ray. The actuator is configured to scan the detector over a range of positions on the second side of the sample to measure the transmitted X-ray by a scattering angle function. The controller is coupled to receive a signal outputted by the detector and control the actuator in response to the signal to increase an acquisition time of the detector at a first position where the intensity of the accommodated X-ray is weak with respect to an acquisition time of the detector at a second position where the intensity of the accommodated X-ray is strong.