首页> 外国专利> Method for preparing anti-reflection surface using plasma etching and substrate having anti-reflection surface

Method for preparing anti-reflection surface using plasma etching and substrate having anti-reflection surface

机译:利用等离子体蚀刻制备防反射表面的方法和具有防反射表面的基板

摘要

The present invention can improve the durability and the excellent light transmission and anti-reflection effect by controlling the anti-reflection structure layer formed through repetitive control of the plasma dry etching and the inorganic material deposition to various structures, A method of manufacturing an antireflection surface capable of imparting functionality such as scratch resistance, and a substrate on which an antireflection surface is formed.
机译:本发明通过控制通过反复控制等离子干法蚀刻和无机材料沉积到各种结构而形成的减反射结构层,可以改善耐久性以及优异的透光性和减反射效果。具有赋予抗划伤性等功能的基板以及形成有防反射面的基板。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号