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Method for preparing anti-reflection surface using plasma etching and substrate having anti-reflection surface
Method for preparing anti-reflection surface using plasma etching and substrate having anti-reflection surface
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机译:利用等离子体蚀刻制备防反射表面的方法和具有防反射表面的基板
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摘要
The present invention can improve the durability and the excellent light transmission and anti-reflection effect by controlling the anti-reflection structure layer formed through repetitive control of the plasma dry etching and the inorganic material deposition to various structures, A method of manufacturing an antireflection surface capable of imparting functionality such as scratch resistance, and a substrate on which an antireflection surface is formed.
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