METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON A POLISHING MEMBER METHOD OF OBTAINING A SLIDING VECTOR DISTRIBUTION OF A DRESSER ON A POLISHING MEMBER AND POLISHING APPARATUS

摘要

An object of the present invention is to provide a method of acquiring a profile of a polishing member having high precision. The method includes the steps of calculating the increment of the sliding distance of the dresser by multiplying the relative speed of the dresser and the polishing member by the contact time of the dresser and the polishing member, and multiplying the increment of the calculated sliding distance by at least one correction coefficient, And the increment of the corrected sliding distance is repeatedly added in accordance with the elapse of time to calculate the sliding distance, and the distance of sliding distance distribution of the dresser from the position of the obtained sliding distance and sliding distance calculating point . The at least one correction coefficient includes an irregularity correction coefficient provided for the sliding distance calculation point. The corrugation correction coefficient is a correction coefficient for reflecting the difference between the amount of cut of the convex portion formed on the surface of the abrasive member and the amount of cut of the concave portion into the profile of the abrasive member.