POLYCRYSTALLINE CHEMICAL VAPOUR DEPOSITED DIAMOND TOOL PARTS AND METHODS OF FABRICATING MOUNTING AND USING THE SAME

摘要

The present invention relates to a work surface, And a rear mounting surface, the polycrystalline CVD synthetic diamond workpiece for use in a polycrystalline CVD synthetic diamond tool, Wherein an average side particle size of the rear mounting surface is at least 10 탆, (A) diamond particles smaller than the rear mounting surface; (b) an average lateral particle size of 10 nm to 15 [mu] m; And (c) a Raman signal generated by a laser focused on a work surface representing one or more of the following characteristics: (1), sp3 carbon peak at 1,332 cm ^-1 having a half value width of 8.0 cm ^-1 or less; (2) an sp 2 carbon peak at 1,550 cm ^-1 , with a height of 20% or less of the height of the sp3 carbon peak at 1,332 cm ^-1 after background subtraction when using a 633 nm Raman excitation source; And (3) sp3 carbon peak at 1,332 cm " ^{1 &} gt ;, which is at least 10% of the local background intensity of the Raman spectrum using a 785 nm Raman excitation source.