Heating temperature test system of heating jacket

摘要

The present invention relates to a test system for testing heating temperature in a heating jacket covering a vent pipe through which exhaust gas in a semiconductor process passes, which tests heating temperature of an inner wall of the heating jacket in a state where the heating jacket is arranged so that the cross section is circular, identical with being covered around the actual vent pipe, so that the inside and the outside are blocked. According to the present invention, the test system provides an advantage of allowing temperature in the heating jacket in a shape of having the circularly rolled cross section not to be influenced by air temperature by having each of first and second closing members at the ends of the heating jacket, which are mutually connected to each other.