3 METHOD FOR REMOVING MOIRE PATTERN NOISE IN A TREEE-DIMENSIONAL SHAPE MEASURING MICROSCOPE

摘要

Disclosed is a method of removing a moire pattern noise from a three-dimensional shape measurement microscope. A three-dimensional shape measurement microscope includes: a light source; a digital fringe; and an imaging device formed to receive an image of the surface of a measurement subject in a state, in which the digital fringe is projected via a projection lens part and an object lens part, through an object lens system and an image formation lens system. In order to measure the measurement subject with the three-dimensional shape measurement microscope, the method includes the following steps of: obtaining a reference pattern image, from which a moire noise is removed or in which the moire noise is weakened, by forming a reference pattern image of a digital device for the formation of a digital fringe in a defocusing state which is out of a correct focusing state; and obtaining regional level data of the measurement subject by analyzing the reference pattern image formed in the defocusing state. According to the present invention, the method is capable of inhibiting and weakening the generation of an unexpected moire pattern in a three-dimensional shape measurement microscope and removing and reducing a noise caused by the moire pattern, while accurately measuring the three-dimensional shape of a subject.