MANUFACTURING METHOD OF TRANSPARENT ACOUSTIC SPEAKER USING FEMTOSECOND LASER TREATMENT PROCESS

摘要

Disclosed is a manufacturing method of a transparent acoustic speaker using a femtosecond laser machining method using glass and a PVDF-based flexible transparent piezoelectric element. According to the present invention, the manufacturing method of a transparent acoustic speaker using a femtosecond laser machining method comprises: (a) a step of forming a first and a second electrode on an upper and a lower surface of a piezoelectric film and then forming a first and a second insulation film covering the first and the second electrode to prepare a piezoelectric element; (b) a step of firstly machining upper and lower glass by a femtosecond laser to form a first and a second micro cavity, and then secondly machining the upper and lower glass by a femtosecond laser to form a first and a second through hole connected to the first and the second micro cavity; (c) a step of forming a second adhesive member on an upper surface of the lower glass and then attaching the piezoelectric element on the upper surface of the lower glass via the second adhesive member; and (d) a step of forming a first adhesive member on an upper surface of the piezoelectric element and then attaching the upper glass to the upper surface of the piezoelectric element via the first adhesive member to affix the upper glass to the lower glass. In the step (b), the femtosecond laser is emitted in a beam size of 10-30 μm.