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Carbon Based Electronic Device and Its Manufacturing Methods with Locally Reduced Graphene Oxide

机译:碳基电子器件及其局部还原氧化石墨烯的制造方法

摘要

The present invention provides a graphene-based carbon-based electronic device and a method of manufacturing the same. Graphene-based electronic device of the present invention is a substrate; A graphene oxide thin film layer formed on the substrate; A gate insulating layer formed on the graphene oxide thin film layer; And a gate electrode formed on the insulating layer. The graphene oxide thin film layer may be one in which graphene oxide is locally reduced by irradiating a laser onto one surface thereof. According to the present invention, the reduction of the graphene oxide has the effect of reducing resistance and improving transparency.
机译:本发明提供了基于石墨烯的碳基电子器件及其制造方法。本发明的基于石墨烯的电子设备是基板。在基板上形成的氧化石墨烯薄膜层。栅极绝缘层形成在氧化石墨烯薄膜层上;栅电极形成在绝缘层上。氧化石墨烯薄膜层可以是其中通过向其一个表面上照射激光来局部还原氧化石墨烯的层。根据本发明,氧化石墨烯的还原具有降低电阻和提高透明性的效果。

著录项

  • 公开/公告号KR102039748B1

    专利类型

  • 公开/公告日2019-11-01

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20130024729

  • 发明设计人 김용수;최학순;

    申请日2013-03-07

  • 分类号H01B13;C01B31/02;H01L29/78;

  • 国家 KR

  • 入库时间 2022-08-21 11:47:29

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