The design of a multi-junction photoelectric converter with a vertically oriented columnar structure based on the integration of semiconductor compounds and crystalline silicon and the method of its manufacture

摘要

FIELD: power engineering.SUBSTANCE: invention relates to production of solar cells and can be used in photovoltaics, mainly in solar cells or photoelectric converters (PEC) during conversion of solar radiation. Method of manufacturing of periodic vertically oriented columnar structure of PEC comprises formation on surface of crystalline silicon of relief from periodic vertical-oriented columnar structure with fibers with diameter of 0.1–2.5 mcm and height of 0.5–10 mcm, located at distance from each other not less than two total thicknesses of all subsequent layers deposited on fibers. Formation of vertically oriented columnar structure is performed by dry plasma-chemical etching using polystyrene spheres as a mask with subsequent chemical treatment of surface to remove damaged layer of silicon with thickness of 5–50 nm. Further, semiconductor layers of solid solutions based on compounds A3B5 or a-SiC:H are successively deposited on the fibers to form a lower transition based on crystalline silicon and forming one or more upper p-n or p-i-n transitions of the photoelectric converter. As a result, when illuminating such a structure on the side of the fibers, light passes a considerably larger distance and is absorbed in semiconductor layers of upper transition or transitions to a much higher degree than in case of flat (planar) structure. Structure can be made using both silicon plates and layers of crystalline silicon with thickness of 2–20 mcm, formed on a carrier substrate, including a flexible one.EFFECT: invention provides the possibility of increasing the short circuit current of the upper stage of the PEC and, consequently, increasing the efficiency of the whole PEC.3 cl, 4 dwg