MICROWAVE FILTER BASED ON WAVEGUIDE INTEGRATED INTO SUBSTRATE AND METHOD OF ITS MANUFACTURING

摘要

FIELD: manufacturing technology.;SUBSTANCE: invention can be used to create microwave filters. Substance of the invention consists in that the microwave filter based on the waveguide integrated into the substrate, formed by a chain of coupled resonators, the design of which consists of the following components: metal base, a substrate based on high-resistance monocrystalline silicon with two-sided metallization of planes, in which through metallized holes are made, electrically combining metal coating and setting zones of volume resonators of the filter, waveguide integrated into substrate, formed by high-resistance silicon substrate, double-side metallization, input and output transmission lines, characterized in that through metallized holes on the filter outer sides form a two-dimensional structure, the parameters of which are selected from certain conditions.;EFFECT: possibility of improving manufacturing accuracy.;19 cl, 9 dwg