FREQUENCY RESONANT DIFFERENTIAL PRESSURE SENSOR AND FREQUENCY RESONANCE DIFFERENTIAL PRESSURE SENSOR

摘要

FIELD: measurement.;SUBSTANCE: invention relates to measurement equipment, namely to frequency-resonant sensitive elements (SE) of differential pressure and built on their basis converters, sensors with frequency and digital output, capable of high accuracy of measuring small drops relative to high pressures of liquid and gaseous aggressive media. In frequency-resonant differential pressure sensor (FRS), comprising sealed measuring housing with SE, as well as excitation system of resonance mechanical oscillations of SE resonating parts with frequency proportional to measured differential pressure, and their conversion into a frequency electrical signal, the SE is used, which comprises a membrane from elastic material, separating compared pressure, on opposite surfaces of which in its central part with displacement in thickness relative to its neutral plane in outer sides are fixed two tuned to different resonance frequency strain-sensitive resonators (SSR), sealed in vacuum or in neutral gas medium protective covers with recesses, and on contour of membrane with one or in version on both sides of hermetically mounted one or respectively two separation covers with recesses overlapping pair SSR with protective covers, wherein SE by central part of external surface of one of separating covers forming cavity above SSR with larger resonance frequency is fixed to inner wall of measuring housing FRS of black hole via spacer with formation of minimum gap outside zone of connection between SSR and FRS.;EFFECT: technical result is increased sensitivity to differential pressure and more complete neutralization of destabilizing factors: temperature, vibrations, shocks, aging, static pressure, including their mutual effect, and other "noise" factors.;12 cl, 10 dwg