PASSIVE WIRELESS ULTRAVIOLET RADIATION SENSOR ON SURFACE ACOUSTIC WAVES

摘要

FIELD: measuring equipment.;SUBSTANCE: invention relates to semiconductor devices for measuring ultraviolet radiation intensity. Sensor comprises housing with piezoelectric acoustic line inside, on ends of which there is sound absorber. On surface of acoustic line there are two transmit-receive interdigitated transducer (IDT) and two reflecting IDT. First transmit-receive IDT and the first reflecting IDT form a measuring channel, the second pair of the IDT is a reference channel. Distance between IDT in measurement channel is more than in reference one. Transmit-receive IDT are connected to antennas, which are half-wave vibrators. Measuring transmit-receive IDT is also connected to impedance. Impedance is an IDT arranged on a dielectric substrate, a photosensitive film is applied on the surface of the IDT, the conductivity of which depends on the intensity of the UV radiation.;EFFECT: high sensitivity and accuracy of measuring UV radiation intensity.;4 cl, 6 dwg, 3 tbl