use of high -performance ultrasonic pulse laser for material removal,Procedure for material removal and equipment for material removal of a solid body and /or at least one layer thereon

摘要

The present invention relates to uses of a high performance - ultra short pulse laser for removal of material, method for removing material of a solid body (2) and / or at least a layer located on it, with at least one laser and a rapid beam deflection device and means for removing material of a solid body and / or at least a layer located on it, with at least one laser beam deflection device and a fast.These are distinguished, in particular, characterized in that the solid body and / or the at least a layer with a high rate in the micrometer range and / or nanometer range, are removed.For this purpose, a high performance - very high frequency pulsed laser with a pulse repetition frequency greater than 400 mhz and a power of greater than 100 w to the material removal of solid bodies and / or at least a layer located on it, by melting, evaporation and / or ablation with acting ablation cooling is used, wherein the laser radiation of the respective pulse to the surface of the body, and during the pulse duration of the resulting process without regard to the plasma penetrates particle cloud ablated to make.n="14"