Laser processing device and operating test method

摘要

A laser processing apparatus is provided that includes a laser light source configured to output laser light, a spatial light modulator configured to modulate the laser light power of the laser light source according to a phase pattern and output the modulated laser light, an objective lens configured converging the laser light emitted from the spatial light modulator to an object, a controller configured to control a phase pattern to be displayed on the spatial light modulator, and a determining device configured to determine whether the operation of the laser light modulator is to be performed spatial light modulator is normal, wherein the controller performs a switching control in which the phase pattern to be displayed on the spatial light modulator is switched, and the determining device based on a change in intensity of the spatial light modulator or emitted laser light before the switching control and after the switching control performs.