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Quantify and reduce the overall measurement uncertainty
Quantify and reduce the overall measurement uncertainty
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机译:量化并减少总体测量不确定度
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摘要
A process control technique uses production data from multiple manufacturing tools and multiple inspection or metrology tools. The total measurement uncertainty (TMU) can be calculated from the production data. These include measurements of one or more components made with the manufacturing tools. Manufacturing steps can be ranked using the TMU or otherwise compared. All production modes and recipes can be continuously monitored based on production data.
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