Device for determining a focal position in a laser processing system, laser processing system with the same and method for determining a focal position in a laser processing system

摘要

The present disclosure relates to a device (200) for determining a focal position (F) of a laser beam (10) in a laser processing system (100). The device (200) comprises a first optical element (210), which is set up for a reflection of a part of the laser beam (10) for decoupling a first sub-beam (12) of the laser beam (10), a second optical element (220) for a reflection of another part of the laser beam (10) for decoupling a second sub-beam (14) of the laser beam (10) substantially coaxial with the first sub-beam (12), a spatially resolving sensor (230) onto which the first sub-beam (12 ) and the second sub-beam (14) are steerable, and an evaluation unit (240), which is adapted to a focal position (F) of the laser beam based on the first and second sub-beams (12, 14) striking the position-resolving sensor (230) (10).