An ultrafine pattern depositing apparatus, an ultrafine pattern depositing method using the same, and a light emitting display apparatus produced by the ultrafine pattern depositing method

摘要

An apparatus for depositing an ultrafine pattern is provided. An apparatus for depositing an ultrafine pattern includes a base substrate, a heating member, a laminate member, and a pattern guide. The heating part is contained in the base substrate and generates heat. The layered material part is deposited on the heating part. The pattern guide has an opening including a laterally recessed lower portion and an upper portion protruding from the lower portion to guide a laminate material emitted from the laminate portion to a target area.