PICTURE SENSOR FOR A POSITION SENSOR DEVICE, POSITION SENSOR DEVICE WITH AN IMAGE SENSOR, LITHOGRAPHIC APPARATUS WITH A POSITION SENSOR DEVICE AND METHOD FOR OPERATING AN IMAGE SENSOR

摘要

An image sensor (200) for a position sensor device (140) for determining a position of at least one mirror (M1-M6) of a lithography system (100, 100A), comprising: a plurality N1 of integrated optical waveguides (220), a plurality N2 of radiation surfaces (210), with N2 ≥ N1, wherein a respective one of the N2 radiation surfaces (210) is associated with one of the N1 integrated optical fibers (220) and adapted to couple incident light into the associated integrated optical fiber (220), a light signal is generated in the associated integrated optical waveguide (220), a multiplexer device (230) coupled to the N1 integrated optical waveguides (220) for multiplexing the optical signals generated in the N1 integrated optical waveguides (220) onto a number N3 of secondary optical waveguides (240), with N1 ≥ N3, and an image reconstructor (250) coupled to the N3 secondary optical fibers (240) for reconstructing an image in response to the light signals of the N3 secondary optical fibers (240).